Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography

• Main Authors: Malar, P., Zhao, J., Van Kan, J.A.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Ni mould fabrication; Proton beam writing; UV lithography
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98704
• Institution: National University of Singapore

10.1016/j.apsusc.2011.10.014