Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices

10.1016/j.mee.2012.05.020

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Bibliographic Details
Main Authors: Liu, F., Tan, K.B., Malar, P., Bikkarolla, S.K., Van Kan, J.A.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98707
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Institution: National University of Singapore