Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices

10.1016/j.mee.2012.05.020

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Bibliographic Details
Main Authors:	Liu, F., Tan, K.B., Malar, P., Bikkarolla, S.K., Van Kan, J.A.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	DNA analysis Nickel molds Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98707
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98707
record_format	dspace
spelling	sg-nus-scholar.10635-987072024-11-15T07:07:14Z Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices Liu, F. Tan, K.B. Malar, P. Bikkarolla, S.K. Van Kan, J.A. PHYSICS DNA analysis Nickel molds Proton beam writing 10.1016/j.mee.2012.05.020 Microelectronic Engineering 102 36-39 MIENE 2014-10-16T09:50:26Z 2014-10-16T09:50:26Z 2013-02 Conference Paper Liu, F., Tan, K.B., Malar, P., Bikkarolla, S.K., Van Kan, J.A. (2013-02). Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices. Microelectronic Engineering 102 : 36-39. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.05.020 01679317 http://scholarbank.nus.edu.sg/handle/10635/98707 000312232300011 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	DNA analysis Nickel molds Proton beam writing
spellingShingle	DNA analysis Nickel molds Proton beam writing Liu, F. Tan, K.B. Malar, P. Bikkarolla, S.K. Van Kan, J.A. Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
description	10.1016/j.mee.2012.05.020
author2	PHYSICS
author_facet	PHYSICS Liu, F. Tan, K.B. Malar, P. Bikkarolla, S.K. Van Kan, J.A.
format	Conference or Workshop Item
author	Liu, F. Tan, K.B. Malar, P. Bikkarolla, S.K. Van Kan, J.A.
author_sort	Liu, F.
title	Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
title_short	Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
title_full	Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
title_fullStr	Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
title_full_unstemmed	Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
title_sort	fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98707
_version_	1821230087653031936

Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices

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