Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
10.1016/j.mee.2012.05.020
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Main Authors: | Liu, F., Tan, K.B., Malar, P., Bikkarolla, S.K., Van Kan, J.A. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98707 |
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Institution: | National University of Singapore |
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