Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing

• Main Authors: Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F.
• 其他作者: PHYSICS
• 格式: Article
• 出版: 2014
• 主題: High-aspect-ratio; Lithography; Proton beam writing; Resist stripping
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/97767

10.1143/JJAP.47.8600