Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing

Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing

10.1143/JJAP.47.8600

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Bibliographic Details
Main Authors: Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
High-aspect-ratio
Lithography
Proton beam writing
Resist stripping
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97767
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/97767

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