Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing

10.1143/JJAP.47.8600

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Bibliographic Details
Main Authors:	Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	High-aspect-ratio Lithography Proton beam writing Resist stripping
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97767
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97767
record_format	dspace
spelling	sg-nus-scholar.10635-977672024-11-14T01:01:12Z Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing Valamontes, E. Chatzichristidi, M. Tsikrikas, N. Goustouridis, D. Raptis, I. Potiriadis, C. Van Kan, J.A. Watt, F. PHYSICS High-aspect-ratio Lithography Proton beam writing Resist stripping 10.1143/JJAP.47.8600 Japanese Journal of Applied Physics 47 11 8600-8605 2014-10-16T09:39:06Z 2014-10-16T09:39:06Z 2008-11-14 Article Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F. (2008-11-14). Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing. Japanese Journal of Applied Physics 47 (11) : 8600-8605. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.47.8600 00214922 http://scholarbank.nus.edu.sg/handle/10635/97767 000261311400076 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	High-aspect-ratio Lithography Proton beam writing Resist stripping
spellingShingle	High-aspect-ratio Lithography Proton beam writing Resist stripping Valamontes, E. Chatzichristidi, M. Tsikrikas, N. Goustouridis, D. Raptis, I. Potiriadis, C. Van Kan, J.A. Watt, F. Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
description	10.1143/JJAP.47.8600
author2	PHYSICS
author_facet	PHYSICS Valamontes, E. Chatzichristidi, M. Tsikrikas, N. Goustouridis, D. Raptis, I. Potiriadis, C. Van Kan, J.A. Watt, F.
format	Article
author	Valamontes, E. Chatzichristidi, M. Tsikrikas, N. Goustouridis, D. Raptis, I. Potiriadis, C. Van Kan, J.A. Watt, F.
author_sort	Valamontes, E.
title	Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
title_short	Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
title_full	Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
title_fullStr	Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
title_full_unstemmed	Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
title_sort	realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97767
_version_	1821201108490518528

Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing

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