Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
10.1143/JJAP.47.8600
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Main Authors: | Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97767 |
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Institution: | National University of Singapore |
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