Sidewall quality in proton beam writing

Sidewall quality in proton beam writing

10.1016/j.nimb.2007.02.012

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Bibliographic Details
Main Authors: Chiam, S.Y., van Kan, J.A., Osipowicz, T., Udalagama, C.N.B., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Cross sectional resist roughness
PMMA
Proton beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97916
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/97916

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