Sidewall quality in proton beam writing

10.1016/j.nimb.2007.02.012

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Bibliographic Details
Main Authors:	Chiam, S.Y., van Kan, J.A., Osipowicz, T., Udalagama, C.N.B., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Cross sectional resist roughness PMMA Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97916
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Institution:	National University of Singapore

Description
Summary:	10.1016/j.nimb.2007.02.012

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