New resists for proton beam writing

• Main Authors: van Kan, J.A., Bettiol, A.A., Chiam, S.Y., Saifullah, M.S.M., Subramanian, K.R.V., Welland, M.E., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: Direct write; High aspect ratio; Proton beam writing; Resist
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/97320
• Institution: National University of Singapore

10.1016/j.nimb.2007.02.063