New resists for proton beam writing

10.1016/j.nimb.2007.02.063

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Bibliographic Details
Main Authors:	van Kan, J.A., Bettiol, A.A., Chiam, S.Y., Saifullah, M.S.M., Subramanian, K.R.V., Welland, M.E., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Direct write High aspect ratio Proton beam writing Resist
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97320
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-973202024-11-14T01:01:08Z New resists for proton beam writing van Kan, J.A. Bettiol, A.A. Chiam, S.Y. Saifullah, M.S.M. Subramanian, K.R.V. Welland, M.E. Watt, F. PHYSICS Direct write High aspect ratio Proton beam writing Resist 10.1016/j.nimb.2007.02.063 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 460-463 NIMBE 2014-10-16T09:33:52Z 2014-10-16T09:33:52Z 2007-07 Article van Kan, J.A., Bettiol, A.A., Chiam, S.Y., Saifullah, M.S.M., Subramanian, K.R.V., Welland, M.E., Watt, F. (2007-07). New resists for proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 460-463. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.063 0168583X http://scholarbank.nus.edu.sg/handle/10635/97320 000248264900089 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Direct write High aspect ratio Proton beam writing Resist
spellingShingle	Direct write High aspect ratio Proton beam writing Resist van Kan, J.A. Bettiol, A.A. Chiam, S.Y. Saifullah, M.S.M. Subramanian, K.R.V. Welland, M.E. Watt, F. New resists for proton beam writing
description	10.1016/j.nimb.2007.02.063
author2	PHYSICS
author_facet	PHYSICS van Kan, J.A. Bettiol, A.A. Chiam, S.Y. Saifullah, M.S.M. Subramanian, K.R.V. Welland, M.E. Watt, F.
format	Article
author	van Kan, J.A. Bettiol, A.A. Chiam, S.Y. Saifullah, M.S.M. Subramanian, K.R.V. Welland, M.E. Watt, F.
author_sort	van Kan, J.A.
title	New resists for proton beam writing
title_short	New resists for proton beam writing
title_full	New resists for proton beam writing
title_fullStr	New resists for proton beam writing
title_full_unstemmed	New resists for proton beam writing
title_sort	new resists for proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97320
_version_	1821190075547910144

New resists for proton beam writing

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