Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

10.1016/j.nimb.2007.02.064

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Bibliographic Details
Main Authors: Dutta, R.K., van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Electroplating
Microlens array
Nanoimprinting Lithography
PMGI resist
Proton beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97567
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/97567

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