Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp

• Main Authors: Dutta, R.K., van Kan, J.A., Bettiol, A.A., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: Electroplating; Microlens array; Nanoimprinting Lithography; PMGI resist; Proton beam writing
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/97567
• Institution: National University of Singapore

10.1016/j.nimb.2007.02.064