High aspect ratio PDMS replication through proton beam fabricated Ni masters
10.1016/j.nimb.2007.02.046
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96778 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-96778 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-967782023-10-26T20:43:38Z High aspect ratio PDMS replication through proton beam fabricated Ni masters van Kan, J.A. Wang, L.P. Shao, P.G. Bettiol, A.A. Watt, F. PHYSICS High aspect ratio Ni stamps PDMS Proton beam writing Soft lithography 10.1016/j.nimb.2007.02.046 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 353-356 NIMBE 2014-10-16T09:27:25Z 2014-10-16T09:27:25Z 2007-07 Article van Kan, J.A., Wang, L.P., Shao, P.G., Bettiol, A.A., Watt, F. (2007-07). High aspect ratio PDMS replication through proton beam fabricated Ni masters. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 353-356. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.046 0168583X http://scholarbank.nus.edu.sg/handle/10635/96778 000248264900068 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
High aspect ratio Ni stamps PDMS Proton beam writing Soft lithography |
| spellingShingle |
High aspect ratio Ni stamps PDMS Proton beam writing Soft lithography van Kan, J.A. Wang, L.P. Shao, P.G. Bettiol, A.A. Watt, F. High aspect ratio PDMS replication through proton beam fabricated Ni masters |
| description |
10.1016/j.nimb.2007.02.046 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS van Kan, J.A. Wang, L.P. Shao, P.G. Bettiol, A.A. Watt, F. |
| format |
Article |
| author |
van Kan, J.A. Wang, L.P. Shao, P.G. Bettiol, A.A. Watt, F. |
| author_sort |
van Kan, J.A. |
| title |
High aspect ratio PDMS replication through proton beam fabricated Ni masters |
| title_short |
High aspect ratio PDMS replication through proton beam fabricated Ni masters |
| title_full |
High aspect ratio PDMS replication through proton beam fabricated Ni masters |
| title_fullStr |
High aspect ratio PDMS replication through proton beam fabricated Ni masters |
| title_full_unstemmed |
High aspect ratio PDMS replication through proton beam fabricated Ni masters |
| title_sort |
high aspect ratio pdms replication through proton beam fabricated ni masters |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96778 |
| _version_ |
1781786538642767872 |