High aspect ratio PDMS replication through proton beam fabricated Ni masters

• Main Authors: van Kan, J.A., Wang, L.P., Shao, P.G., Bettiol, A.A., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: High aspect ratio; Ni stamps; PDMS; Proton beam writing; Soft lithography
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/96778
• Institution: National University of Singapore

10.1016/j.nimb.2007.02.046