High precision 3D metallic microstructures produced using proton beam micromachining

High precision 3D metallic microstructures produced using proton beam micromachining

10.1016/S0168-583X(01)00360-3

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Bibliographic Details
Main Authors: Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electroplating
High aspect ratio
Nuclear miroscope
Proton beam micromachining
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98739
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/98739

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