High precision 3D metallic microstructures produced using proton beam micromachining
10.1016/S0168-583X(01)00360-3
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2014
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sg-nus-scholar.10635-987392023-10-30T08:26:44Z High precision 3D metallic microstructures produced using proton beam micromachining Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS Electroplating High aspect ratio Nuclear miroscope Proton beam micromachining 10.1016/S0168-583X(01)00360-3 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 181 1-4 258-262 NIMBE 2014-10-16T09:50:51Z 2014-10-16T09:50:51Z 2001-07 Conference Paper Van Kan, J.A., Bettiol, A.A., Watt, F. (2001-07). High precision 3D metallic microstructures produced using proton beam micromachining. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 181 (1-4) : 258-262. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)00360-3 0168583X http://scholarbank.nus.edu.sg/handle/10635/98739 000170885400043 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Electroplating High aspect ratio Nuclear miroscope Proton beam micromachining |
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Electroplating High aspect ratio Nuclear miroscope Proton beam micromachining Van Kan, J.A. Bettiol, A.A. Watt, F. High precision 3D metallic microstructures produced using proton beam micromachining |
| description |
10.1016/S0168-583X(01)00360-3 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Van Kan, J.A. Bettiol, A.A. Watt, F. |
| format |
Conference or Workshop Item |
| author |
Van Kan, J.A. Bettiol, A.A. Watt, F. |
| author_sort |
Van Kan, J.A. |
| title |
High precision 3D metallic microstructures produced using proton beam micromachining |
| title_short |
High precision 3D metallic microstructures produced using proton beam micromachining |
| title_full |
High precision 3D metallic microstructures produced using proton beam micromachining |
| title_fullStr |
High precision 3D metallic microstructures produced using proton beam micromachining |
| title_full_unstemmed |
High precision 3D metallic microstructures produced using proton beam micromachining |
| title_sort |
high precision 3d metallic microstructures produced using proton beam micromachining |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98739 |
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1781786940176072704 |