Proton beam micromachining: A new tool for precision three-dimensional microstructures

• Main Authors: Van Kan, J.A., Bettiol, A.A., Wee, B.S., Sum, T.C., Tang, S.M., Watt, F.
• 其他作者: PHYSICS
• 格式: Article
• 出版: 2014
• 主題: High aspect ratio; Micromachining; Nuclear microscope; Plating; Proton beam
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/97635
• 機構: National University of Singapore

10.1016/S0924-4247(01)00574-X