The use of proton microbeams for the production of microcomponents

The use of proton microbeams for the production of microcomponents

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

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Bibliographic Details
Main Authors: Osipowicz, T., Van Kan, J.A., Sum, T.C., Sanchez, J.L., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
High aspect-ratio
Micromachining
Nuclear microscope
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98327
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/98327

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