The use of proton microbeams for the production of microcomponents

• Main Authors: Osipowicz, T., Van Kan, J.A., Sum, T.C., Sanchez, J.L., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: High aspect-ratio; Micromachining; Nuclear microscope
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98327
• Institution: National University of Singapore

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms