The use of proton microbeams for the production of microcomponents
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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sg-nus-scholar.10635-983272024-11-14T01:01:30Z The use of proton microbeams for the production of microcomponents Osipowicz, T. Van Kan, J.A. Sum, T.C. Sanchez, J.L. Watt, F. PHYSICS High aspect-ratio Micromachining Nuclear microscope Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 161-163 83-89 NIMBE 2014-10-16T09:45:48Z 2014-10-16T09:45:48Z 2000 Article Osipowicz, T.,Van Kan, J.A.,Sum, T.C.,Sanchez, J.L.,Watt, F. (2000). The use of proton microbeams for the production of microcomponents. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 161-163 : 83-89. ScholarBank@NUS Repository. 0168583X http://scholarbank.nus.edu.sg/handle/10635/98327 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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High aspect-ratio Micromachining Nuclear microscope |
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High aspect-ratio Micromachining Nuclear microscope Osipowicz, T. Van Kan, J.A. Sum, T.C. Sanchez, J.L. Watt, F. The use of proton microbeams for the production of microcomponents |
| description |
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Osipowicz, T. Van Kan, J.A. Sum, T.C. Sanchez, J.L. Watt, F. |
| format |
Article |
| author |
Osipowicz, T. Van Kan, J.A. Sum, T.C. Sanchez, J.L. Watt, F. |
| author_sort |
Osipowicz, T. |
| title |
The use of proton microbeams for the production of microcomponents |
| title_short |
The use of proton microbeams for the production of microcomponents |
| title_full |
The use of proton microbeams for the production of microcomponents |
| title_fullStr |
The use of proton microbeams for the production of microcomponents |
| title_full_unstemmed |
The use of proton microbeams for the production of microcomponents |
| title_sort |
use of proton microbeams for the production of microcomponents |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98327 |
| _version_ |
1821220121965756416 |