Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

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Bibliographic Details
Main Authors: Van Kan, J.A., Sanchez, J.L., Xu, B., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
High aspect ratio
Micromachining
Nuclear microscope
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97196
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/97196

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