Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

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Bibliographic Details
Main Authors:	Van Kan, J.A., Sanchez, J.L., Xu, B., Osipowicz, T., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	High aspect ratio Micromachining Nuclear microscope
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97196
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97196
record_format	dspace
spelling	sg-nus-scholar.10635-971962024-11-14T01:01:22Z Micromachining using focused high energy ion beams: Deep Ion Beam Lithography Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F. PHYSICS High aspect ratio Micromachining Nuclear microscope Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 148 1-4 1085-1089 NIMBE 2014-10-16T09:32:24Z 2014-10-16T09:32:24Z 1999 Article Van Kan, J.A.,Sanchez, J.L.,Xu, B.,Osipowicz, T.,Watt, F. (1999). Micromachining using focused high energy ion beams: Deep Ion Beam Lithography. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 148 (1-4) : 1085-1089. ScholarBank@NUS Repository. 0168583X http://scholarbank.nus.edu.sg/handle/10635/97196 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	High aspect ratio Micromachining Nuclear microscope
spellingShingle	High aspect ratio Micromachining Nuclear microscope Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F. Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
description	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F.
format	Article
author	Van Kan, J.A. Sanchez, J.L. Xu, B. Osipowicz, T. Watt, F.
author_sort	Van Kan, J.A.
title	Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
title_short	Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
title_full	Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
title_fullStr	Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
title_full_unstemmed	Micromachining using focused high energy ion beams: Deep Ion Beam Lithography
title_sort	micromachining using focused high energy ion beams: deep ion beam lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97196
_version_	1821225499866693632

Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

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