Proton beam micromachining: A new tool for precision three-dimensional microstructures

Proton beam micromachining: A new tool for precision three-dimensional microstructures

10.1016/S0924-4247(01)00574-X

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Bibliographic Details
Main Authors: Van Kan, J.A., Bettiol, A.A., Wee, B.S., Sum, T.C., Tang, S.M., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
High aspect ratio
Micromachining
Nuclear microscope
Plating
Proton beam
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97635
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Institution: National University of Singapore
Description
Summary:10.1016/S0924-4247(01)00574-X

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