Proton beam micromachining: A new tool for precision three-dimensional microstructures

10.1016/S0924-4247(01)00574-X

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Bibliographic Details
Main Authors:	Van Kan, J.A., Bettiol, A.A., Wee, B.S., Sum, T.C., Tang, S.M., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	High aspect ratio Micromachining Nuclear microscope Plating Proton beam
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97635
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97635
record_format	dspace
spelling	sg-nus-scholar.10635-976352024-11-14T01:01:16Z Proton beam micromachining: A new tool for precision three-dimensional microstructures Van Kan, J.A. Bettiol, A.A. Wee, B.S. Sum, T.C. Tang, S.M. Watt, F. PHYSICS High aspect ratio Micromachining Nuclear microscope Plating Proton beam 10.1016/S0924-4247(01)00574-X Sensors and Actuators, A: Physical 92 1-3 370-374 SAAPE 2014-10-16T09:37:33Z 2014-10-16T09:37:33Z 2001-08-01 Article Van Kan, J.A., Bettiol, A.A., Wee, B.S., Sum, T.C., Tang, S.M., Watt, F. (2001-08-01). Proton beam micromachining: A new tool for precision three-dimensional microstructures. Sensors and Actuators, A: Physical 92 (1-3) : 370-374. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(01)00574-X 09244247 http://scholarbank.nus.edu.sg/handle/10635/97635 000170148500055 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	High aspect ratio Micromachining Nuclear microscope Plating Proton beam
spellingShingle	High aspect ratio Micromachining Nuclear microscope Plating Proton beam Van Kan, J.A. Bettiol, A.A. Wee, B.S. Sum, T.C. Tang, S.M. Watt, F. Proton beam micromachining: A new tool for precision three-dimensional microstructures
description	10.1016/S0924-4247(01)00574-X
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Bettiol, A.A. Wee, B.S. Sum, T.C. Tang, S.M. Watt, F.
format	Article
author	Van Kan, J.A. Bettiol, A.A. Wee, B.S. Sum, T.C. Tang, S.M. Watt, F.
author_sort	Van Kan, J.A.
title	Proton beam micromachining: A new tool for precision three-dimensional microstructures
title_short	Proton beam micromachining: A new tool for precision three-dimensional microstructures
title_full	Proton beam micromachining: A new tool for precision three-dimensional microstructures
title_fullStr	Proton beam micromachining: A new tool for precision three-dimensional microstructures
title_full_unstemmed	Proton beam micromachining: A new tool for precision three-dimensional microstructures
title_sort	proton beam micromachining: a new tool for precision three-dimensional microstructures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97635
_version_	1821204524865421312

Proton beam micromachining: A new tool for precision three-dimensional microstructures

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