Proton beam fabrication of nickel stamps for nanoimprint lithography

• Main Authors: Ansari, K., Shao, P.G., Van Kan, J.A., Bettiol, A.A., Watt, F.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electroplating; High aspect ratio; Nanoimprint lithography; Proton beam writing; Stamps
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98848
• Institution: National University of Singapore

10.1016/j.nimb.2005.01.091