Proton beam fabrication of nickel stamps for nanoimprint lithography

Proton beam fabrication of nickel stamps for nanoimprint lithography

10.1016/j.nimb.2005.01.091

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Bibliographic Details
Main Authors: Ansari, K., Shao, P.G., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electroplating
High aspect ratio
Nanoimprint lithography
Proton beam writing
Stamps
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98848
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Institution: National University of Singapore
id sg-nus-scholar.10635-98848
record_format dspace
spelling sg-nus-scholar.10635-988482024-11-14T01:01:35Z Proton beam fabrication of nickel stamps for nanoimprint lithography Ansari, K. Shao, P.G. Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS Electroplating High aspect ratio Nanoimprint lithography Proton beam writing Stamps 10.1016/j.nimb.2005.01.091 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 407-412 NIMBE 2014-10-16T09:52:10Z 2014-10-16T09:52:10Z 2005-04 Conference Paper Ansari, K., Shao, P.G., Van Kan, J.A., Bettiol, A.A., Watt, F. (2005-04). Proton beam fabrication of nickel stamps for nanoimprint lithography. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 407-412. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.091 0168583X http://scholarbank.nus.edu.sg/handle/10635/98848 000229752400068 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Electroplating
High aspect ratio
Nanoimprint lithography
Proton beam writing
Stamps
spellingShingle Electroplating
High aspect ratio
Nanoimprint lithography
Proton beam writing
Stamps
Ansari, K.
Shao, P.G.
Van Kan, J.A.
Bettiol, A.A.
Watt, F.
Proton beam fabrication of nickel stamps for nanoimprint lithography
description 10.1016/j.nimb.2005.01.091
author2 PHYSICS
author_facet PHYSICS
Ansari, K.
Shao, P.G.
Van Kan, J.A.
Bettiol, A.A.
Watt, F.
format Conference or Workshop Item
author Ansari, K.
Shao, P.G.
Van Kan, J.A.
Bettiol, A.A.
Watt, F.
author_sort Ansari, K.
title Proton beam fabrication of nickel stamps for nanoimprint lithography
title_short Proton beam fabrication of nickel stamps for nanoimprint lithography
title_full Proton beam fabrication of nickel stamps for nanoimprint lithography
title_fullStr Proton beam fabrication of nickel stamps for nanoimprint lithography
title_full_unstemmed Proton beam fabrication of nickel stamps for nanoimprint lithography
title_sort proton beam fabrication of nickel stamps for nanoimprint lithography
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98848
_version_ 1821209149847896064

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