A progress review of proton beam writing applications in microphotonics

10.1016/j.nimb.2005.01.084

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Bibliographic Details
Main Authors:	Bettiol, A.A., Sum, T.C., Cheong, F.C., Sow, C.H., Venugopal Rao, S., Van Kan, J.A., Teo, E.J., Ansari, K., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Gratings Microlens arrays Photonics Proton beam writing Waveguides
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/53267
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-53267
record_format	dspace
spelling	sg-nus-scholar.10635-532672023-10-26T21:03:37Z A progress review of proton beam writing applications in microphotonics Bettiol, A.A. Sum, T.C. Cheong, F.C. Sow, C.H. Venugopal Rao, S. Van Kan, J.A. Teo, E.J. Ansari, K. Watt, F. PHYSICS MATERIALS SCIENCE Gratings Microlens arrays Photonics Proton beam writing Waveguides 10.1016/j.nimb.2005.01.084 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 1-4 364-371 NIMBE 2014-05-19T02:56:24Z 2014-05-19T02:56:24Z 2005-04 Conference Paper Bettiol, A.A., Sum, T.C., Cheong, F.C., Sow, C.H., Venugopal Rao, S., Van Kan, J.A., Teo, E.J., Ansari, K., Watt, F. (2005-04). A progress review of proton beam writing applications in microphotonics. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 364-371. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.084 0168583X http://scholarbank.nus.edu.sg/handle/10635/53267 000229752400061 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Gratings Microlens arrays Photonics Proton beam writing Waveguides
spellingShingle	Gratings Microlens arrays Photonics Proton beam writing Waveguides Bettiol, A.A. Sum, T.C. Cheong, F.C. Sow, C.H. Venugopal Rao, S. Van Kan, J.A. Teo, E.J. Ansari, K. Watt, F. A progress review of proton beam writing applications in microphotonics
description	10.1016/j.nimb.2005.01.084
author2	PHYSICS
author_facet	PHYSICS Bettiol, A.A. Sum, T.C. Cheong, F.C. Sow, C.H. Venugopal Rao, S. Van Kan, J.A. Teo, E.J. Ansari, K. Watt, F.
format	Conference or Workshop Item
author	Bettiol, A.A. Sum, T.C. Cheong, F.C. Sow, C.H. Venugopal Rao, S. Van Kan, J.A. Teo, E.J. Ansari, K. Watt, F.
author_sort	Bettiol, A.A.
title	A progress review of proton beam writing applications in microphotonics
title_short	A progress review of proton beam writing applications in microphotonics
title_full	A progress review of proton beam writing applications in microphotonics
title_fullStr	A progress review of proton beam writing applications in microphotonics
title_full_unstemmed	A progress review of proton beam writing applications in microphotonics
title_sort	progress review of proton beam writing applications in microphotonics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/53267
_version_	1781411867818721280

A progress review of proton beam writing applications in microphotonics

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