Fabrication of smooth silicon optical devices using proton beam writing

10.1016/j.nimb.2011.02.015

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Bibliographic Details
Main Authors:	Teo, E.J., Bettiol, A.A., Xiong, B.Q.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Electrochemical etching Optical devices Porous silicon Proton beam writing Silicon photonics Waveguides
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98713
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98713
record_format	dspace
spelling	sg-nus-scholar.10635-987132024-11-12T21:00:21Z Fabrication of smooth silicon optical devices using proton beam writing Teo, E.J. Bettiol, A.A. Xiong, B.Q. PHYSICS Electrochemical etching Optical devices Porous silicon Proton beam writing Silicon photonics Waveguides 10.1016/j.nimb.2011.02.015 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 20 2448-2451 NIMBE 2014-10-16T09:50:33Z 2014-10-16T09:50:33Z 2011-10-15 Conference Paper Teo, E.J., Bettiol, A.A., Xiong, B.Q. (2011-10-15). Fabrication of smooth silicon optical devices using proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 (20) : 2448-2451. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2011.02.015 0168583X http://scholarbank.nus.edu.sg/handle/10635/98713 000296544900060 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electrochemical etching Optical devices Porous silicon Proton beam writing Silicon photonics Waveguides
spellingShingle	Electrochemical etching Optical devices Porous silicon Proton beam writing Silicon photonics Waveguides Teo, E.J. Bettiol, A.A. Xiong, B.Q. Fabrication of smooth silicon optical devices using proton beam writing
description	10.1016/j.nimb.2011.02.015
author2	PHYSICS
author_facet	PHYSICS Teo, E.J. Bettiol, A.A. Xiong, B.Q.
format	Conference or Workshop Item
author	Teo, E.J. Bettiol, A.A. Xiong, B.Q.
author_sort	Teo, E.J.
title	Fabrication of smooth silicon optical devices using proton beam writing
title_short	Fabrication of smooth silicon optical devices using proton beam writing
title_full	Fabrication of smooth silicon optical devices using proton beam writing
title_fullStr	Fabrication of smooth silicon optical devices using proton beam writing
title_full_unstemmed	Fabrication of smooth silicon optical devices using proton beam writing
title_sort	fabrication of smooth silicon optical devices using proton beam writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98713
_version_	1821230767199485952

Fabrication of smooth silicon optical devices using proton beam writing

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