Fabrication of silicon microstructures using a high energy ion beam

Fabrication of silicon microstructures using a high energy ion beam

10.1117/12.524314

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Bibliographic Details
Main Authors: Teo, E.J., Liu, M.H., Breese, M.B.H., Tavernier, E.P., Bettiol, A.A., Blackwood, D.J., Watt, F.
Other Authors: MATERIALS SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electrochemical etching
Ion accelerator
Porous silicon
Proton beam writing
Silicon micromachining
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98711
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Institution: National University of Singapore
id sg-nus-scholar.10635-98711
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spelling sg-nus-scholar.10635-987112023-10-30T22:47:01Z Fabrication of silicon microstructures using a high energy ion beam Teo, E.J. Liu, M.H. Breese, M.B.H. Tavernier, E.P. Bettiol, A.A. Blackwood, D.J. Watt, F. MATERIALS SCIENCE PHYSICS Electrochemical etching Ion accelerator Porous silicon Proton beam writing Silicon micromachining 10.1117/12.524314 Proceedings of SPIE - The International Society for Optical Engineering 5347 264-270 PSISD 2014-10-16T09:50:31Z 2014-10-16T09:50:31Z 2004 Conference Paper Teo, E.J., Liu, M.H., Breese, M.B.H., Tavernier, E.P., Bettiol, A.A., Blackwood, D.J., Watt, F. (2004). Fabrication of silicon microstructures using a high energy ion beam. Proceedings of SPIE - The International Society for Optical Engineering 5347 : 264-270. ScholarBank@NUS Repository. https://doi.org/10.1117/12.524314 0277786X http://scholarbank.nus.edu.sg/handle/10635/98711 000189447300030 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Electrochemical etching
Ion accelerator
Porous silicon
Proton beam writing
Silicon micromachining
spellingShingle Electrochemical etching
Ion accelerator
Porous silicon
Proton beam writing
Silicon micromachining
Teo, E.J.
Liu, M.H.
Breese, M.B.H.
Tavernier, E.P.
Bettiol, A.A.
Blackwood, D.J.
Watt, F.
Fabrication of silicon microstructures using a high energy ion beam
description 10.1117/12.524314
author2 MATERIALS SCIENCE
author_facet MATERIALS SCIENCE
Teo, E.J.
Liu, M.H.
Breese, M.B.H.
Tavernier, E.P.
Bettiol, A.A.
Blackwood, D.J.
Watt, F.
format Conference or Workshop Item
author Teo, E.J.
Liu, M.H.
Breese, M.B.H.
Tavernier, E.P.
Bettiol, A.A.
Blackwood, D.J.
Watt, F.
author_sort Teo, E.J.
title Fabrication of silicon microstructures using a high energy ion beam
title_short Fabrication of silicon microstructures using a high energy ion beam
title_full Fabrication of silicon microstructures using a high energy ion beam
title_fullStr Fabrication of silicon microstructures using a high energy ion beam
title_full_unstemmed Fabrication of silicon microstructures using a high energy ion beam
title_sort fabrication of silicon microstructures using a high energy ion beam
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98711
_version_ 1781786935108304896

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