Design analysis and fabrication of a lateral MEMS microactuator
188 p.
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2010
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sg-ntu-dr.10356-361322023-03-11T17:52:54Z Design analysis and fabrication of a lateral MEMS microactuator Chin, Chi Choong Miao Jianmin Xiao Zhongmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing::Product design 188 p. Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. A novel lateral MEMS microactuator switch concept has been developed for RF switching purposes. The high-aspect ratio of the microactuator switch structure is designed and made possible through microfabrication via bulk micromachining; and is developed with thin-film deposition, silicon-glass wafer bonding and DRIE (deep reactive ion etching) technologies. The design has a 'push-pull' reciprocating actuation configuration with a lateral switchcontact structure, and is driven by electrostatic comb-drive actuators. MASTER OF ENGINEERING (MAE) 2010-04-23T02:29:51Z 2010-04-23T02:29:51Z 2007 2007 Thesis Chin, C. C. (2007). Design analysis and fabrication of a lateral MEMS microactuator. Master’s thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/36132 10.32657/10356/36132 application/pdf |
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DRNTU::Engineering::Manufacturing::Product design Chin, Chi Choong Design analysis and fabrication of a lateral MEMS microactuator |
| description |
188 p. |
| author2 |
Miao Jianmin |
| author_facet |
Miao Jianmin Chin, Chi Choong |
| format |
Theses and Dissertations |
| author |
Chin, Chi Choong |
| author_sort |
Chin, Chi Choong |
| title |
Design analysis and fabrication of a lateral MEMS microactuator |
| title_short |
Design analysis and fabrication of a lateral MEMS microactuator |
| title_full |
Design analysis and fabrication of a lateral MEMS microactuator |
| title_fullStr |
Design analysis and fabrication of a lateral MEMS microactuator |
| title_full_unstemmed |
Design analysis and fabrication of a lateral MEMS microactuator |
| title_sort |
design analysis and fabrication of a lateral mems microactuator |
| publishDate |
2010 |
| url |
https://hdl.handle.net/10356/36132 |
| _version_ |
1761781436287811584 |