Design of a heat flux sensor by MEMS technology

• 主要作者: Wan, Siew Ping
• 其他作者: Tan, Fock Lai
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Manufacturing::Product design; DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• 在線閱讀: http://hdl.handle.net/10356/13421

The purpose of this report is to look into the design, fabrication and calibration of a heat flux sensor using MEMS technology. MEMS technology is the acronym for microelectromechanical systems, which is a spin-off from the wafer fabrication techniques of the semiconductor industry. This is a sys...