Ferroelectric films for MEMS type devices using novel hybrid processing technology
Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attent...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/4021 |
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| Institution: | Nanyang Technological University |