Experimental study of in-plane poled piezoelectric diaphragm-based MEMS devices
In recent years, piezoelectric diaphragms with an in-planed poling scheme have been studied and have demonstrated improved actuation over traditional diaphragms. In this study, the design, fabrication and characterization of an in-plane poled MEMS piezoelectric diaphragm will be investigated, with t...
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| 格式: | Theses and Dissertations |
| 語言: | English |
| 出版: |
2013
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| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/54062 |
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| 機構: | Nanyang Technological University |
| 語言: | English |