Experimental study of in-plane poled piezoelectric diaphragm-based MEMS devices

• Main Author: Shen, Zhiyuan.
• Other Authors: Miao Jianmin
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/54062
• Institution: Nanyang Technological University

In recent years, piezoelectric diaphragms with an in-planed poling scheme have been studied and have demonstrated improved actuation over traditional diaphragms. In this study, the design, fabrication and characterization of an in-plane poled MEMS piezoelectric diaphragm will be investigated, with t...