Experimental study of in-plane poled piezoelectric diaphragm-based MEMS devices
In recent years, piezoelectric diaphragms with an in-planed poling scheme have been studied and have demonstrated improved actuation over traditional diaphragms. In this study, the design, fabrication and characterization of an in-plane poled MEMS piezoelectric diaphragm will be investigated, with t...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/54062 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |