Experimental study of in-plane poled piezoelectric diaphragm-based MEMS devices

In recent years, piezoelectric diaphragms with an in-planed poling scheme have been studied and have demonstrated improved actuation over traditional diaphragms. In this study, the design, fabrication and characterization of an in-plane poled MEMS piezoelectric diaphragm will be investigated, with t...

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Bibliographic Details
Main Author: Shen, Zhiyuan.
Other Authors: Miao Jianmin
Format: Theses and Dissertations
Language:English
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/10356/54062
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Institution: Nanyang Technological University
Language: English

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