Development of broadband optical swtiches for DWDM networks based on photonics MEMS

In this work, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.

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Bibliographic Details
Main Authors: Dowd, Philip, Mei, Ting, Lam, Yee Loy, Chan, Yuen Chuen, Zhou, Yan, Ooi, Boon Siew
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/2885
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Institution: Nanyang Technological University