Development of broadband optical swtiches for DWDM networks based on photonics MEMS

• Main Authors: Dowd, Philip, Mei, Ting, Lam, Yee Loy, Chan, Yuen Chuen, Zhou, Yan, Ooi, Boon Siew
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Research Report
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• 在線閱讀: http://hdl.handle.net/10356/2885
• 機構: Nanyang Technological University

In this work, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.