Development of broadband optical swtiches for DWDM networks based on photonics MEMS

In this work, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.

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Bibliographic Details
Main Authors:	Dowd, Philip, Mei, Ting, Lam, Yee Loy, Chan, Yuen Chuen, Zhou, Yan, Ooi, Boon Siew
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:	http://hdl.handle.net/10356/2885
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2885
record_format	dspace
spelling	sg-ntu-dr.10356-28852023-03-04T03:20:33Z Development of broadband optical swtiches for DWDM networks based on photonics MEMS Dowd, Philip Mei, Ting Lam, Yee Loy Chan, Yuen Chuen Zhou, Yan Ooi, Boon Siew School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems In this work, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices. RG 43/99 2008-09-17T09:16:16Z 2008-09-17T09:16:16Z 2003 2003 Research Report http://hdl.handle.net/10356/2885 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Dowd, Philip Mei, Ting Lam, Yee Loy Chan, Yuen Chuen Zhou, Yan Ooi, Boon Siew Development of broadband optical swtiches for DWDM networks based on photonics MEMS
description	In this work, novel Silicon-based MEMS actuator structures are presented, together with a study on the feasibility of using III-V compound semiconductor materials for the fabrication of MEMS devices.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Dowd, Philip Mei, Ting Lam, Yee Loy Chan, Yuen Chuen Zhou, Yan Ooi, Boon Siew
format	Research Report
author	Dowd, Philip Mei, Ting Lam, Yee Loy Chan, Yuen Chuen Zhou, Yan Ooi, Boon Siew
author_sort	Dowd, Philip
title	Development of broadband optical swtiches for DWDM networks based on photonics MEMS
title_short	Development of broadband optical swtiches for DWDM networks based on photonics MEMS
title_full	Development of broadband optical swtiches for DWDM networks based on photonics MEMS
title_fullStr	Development of broadband optical swtiches for DWDM networks based on photonics MEMS
title_full_unstemmed	Development of broadband optical swtiches for DWDM networks based on photonics MEMS
title_sort	development of broadband optical swtiches for dwdm networks based on photonics mems
publishDate	2008
url	http://hdl.handle.net/10356/2885
_version_	1759854100304887808

Development of broadband optical swtiches for DWDM networks based on photonics MEMS

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