Investigation of silicon-based encapsulation for MEMS structures using epi-based processing

• Main Author: Oh, Yun Sheng.
• Other Authors: Poenar Daniel Puiu
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/18946
• Institution: Nanyang Technological University

This report presents a theoretical study, design and simulation of an on-chip epipoly (Si-based) encapsulation on for advanced microelectromechanical systems (MEMS) e.g. for capacitive accelerometers. Test structures were designed to assess the epipoly encapsulation and their layout was drawn using...