Investigation of silicon-based encapsulation for MEMS structures using epi-based processing

• المؤلف الرئيسي: Oh, Yun Sheng.
• مؤلفون آخرون: Poenar Daniel Puiu
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2009
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/18946
• المؤسسة: Nanyang Technological University

This report presents a theoretical study, design and simulation of an on-chip epipoly (Si-based) encapsulation on for advanced microelectromechanical systems (MEMS) e.g. for capacitive accelerometers. Test structures were designed to assess the epipoly encapsulation and their layout was drawn using...