Investigation of silicon-based encapsulation for MEMS structures using epi-based processing
This report presents a theoretical study, design and simulation of an on-chip epipoly (Si-based) encapsulation on for advanced microelectromechanical systems (MEMS) e.g. for capacitive accelerometers. Test structures were designed to assess the epipoly encapsulation and their layout was drawn using...
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Final Year Project |
Language: | English |
Published: |
2009
|
Subjects: | |
Online Access: | http://hdl.handle.net/10356/18946 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
id |
sg-ntu-dr.10356-18946 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-189462023-07-07T15:47:30Z Investigation of silicon-based encapsulation for MEMS structures using epi-based processing Oh, Yun Sheng. Poenar Daniel Puiu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems This report presents a theoretical study, design and simulation of an on-chip epipoly (Si-based) encapsulation on for advanced microelectromechanical systems (MEMS) e.g. for capacitive accelerometers. Test structures were designed to assess the epipoly encapsulation and their layout was drawn using L-edit software to create masks necessary for subsequent fabrication. The usage of epi-poly encapsulation is important for microelectronic processing because it allows further integration with subsequent wafer level packaging which can be incorporated into the process flow of CMOS-MEMS devices. Research papers were studied to find out how the fabrication process of MEMS can cause failures in MEMS operation. Proposals were then discussed on the ways to improve the fabrication processes or the usage of alternative wafer level packaging to replace polysilicon encapsulation. This is essential because production costs may rise due to replacement of faulty MEMS with new ones. Bachelor of Engineering 2009-08-25T09:04:52Z 2009-08-25T09:04:52Z 2009 2009 Final Year Project (FYP) http://hdl.handle.net/10356/18946 en Nanyang Technological University 77 p. application/pdf |
institution |
Nanyang Technological University |
building |
NTU Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NTU Library |
collection |
DR-NTU |
language |
English |
topic |
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems |
spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Oh, Yun Sheng. Investigation of silicon-based encapsulation for MEMS structures using epi-based processing |
description |
This report presents a theoretical study, design and simulation of an on-chip epipoly (Si-based) encapsulation on for advanced microelectromechanical systems (MEMS) e.g. for capacitive accelerometers. Test structures were designed to assess the epipoly encapsulation and their layout was drawn using L-edit software to create masks necessary for subsequent fabrication. The usage of epi-poly encapsulation is important for microelectronic processing because it allows further integration with subsequent wafer level packaging which can be incorporated into the process flow of CMOS-MEMS devices. Research papers were studied to find out how the fabrication process of MEMS can cause failures in MEMS operation. Proposals were then discussed on the ways to improve the fabrication processes or the usage of alternative wafer level packaging to replace polysilicon encapsulation. This is essential because production costs may rise due to replacement of faulty MEMS with new ones. |
author2 |
Poenar Daniel Puiu |
author_facet |
Poenar Daniel Puiu Oh, Yun Sheng. |
format |
Final Year Project |
author |
Oh, Yun Sheng. |
author_sort |
Oh, Yun Sheng. |
title |
Investigation of silicon-based encapsulation for MEMS structures using epi-based processing |
title_short |
Investigation of silicon-based encapsulation for MEMS structures using epi-based processing |
title_full |
Investigation of silicon-based encapsulation for MEMS structures using epi-based processing |
title_fullStr |
Investigation of silicon-based encapsulation for MEMS structures using epi-based processing |
title_full_unstemmed |
Investigation of silicon-based encapsulation for MEMS structures using epi-based processing |
title_sort |
investigation of silicon-based encapsulation for mems structures using epi-based processing |
publishDate |
2009 |
url |
http://hdl.handle.net/10356/18946 |
_version_ |
1772825770339598336 |