Investigation of silicon-based encapsulation for MEMS structures using epi-based processing
This report presents a theoretical study, design and simulation of an on-chip epipoly (Si-based) encapsulation on for advanced microelectromechanical systems (MEMS) e.g. for capacitive accelerometers. Test structures were designed to assess the epipoly encapsulation and their layout was drawn using...
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Format: | Final Year Project |
Language: | English |
Published: |
2009
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Online Access: | http://hdl.handle.net/10356/18946 |
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Institution: | Nanyang Technological University |
Language: | English |
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