Ferroelectric films for MEMS type devices using novel hybrid processing technology

Ferroelectric films for MEMS type devices using novel hybrid processing technology

Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attent...

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Main Author: Zhao, Chang Lei
Other Authors: Zhu Weiguang
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:https://hdl.handle.net/10356/4021
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-40212023-07-04T16:43:30Z Ferroelectric films for MEMS type devices using novel hybrid processing technology Zhao, Chang Lei Zhu Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attention in recent years. This thesis has presented a broad range of work, which aimed at developing, characterizing and evaluating PZT ferroelectric thick films for MEMS type device applications that could be integrated with silicon micromachining. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:42:45Z 2008-09-17T09:42:45Z 2005 2005 Thesis Zhao, C. L. (2005). Ferroelectric films for MEMS type devices using novel hybrid processing technology. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4021 10.32657/10356/4021 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Zhao, Chang Lei
Ferroelectric films for MEMS type devices using novel hybrid processing technology
description Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attention in recent years. This thesis has presented a broad range of work, which aimed at developing, characterizing and evaluating PZT ferroelectric thick films for MEMS type device applications that could be integrated with silicon micromachining.
author2 Zhu Weiguang
author_facet Zhu Weiguang
Zhao, Chang Lei
format Theses and Dissertations
author Zhao, Chang Lei
author_sort Zhao, Chang Lei
title Ferroelectric films for MEMS type devices using novel hybrid processing technology
title_short Ferroelectric films for MEMS type devices using novel hybrid processing technology
title_full Ferroelectric films for MEMS type devices using novel hybrid processing technology
title_fullStr Ferroelectric films for MEMS type devices using novel hybrid processing technology
title_full_unstemmed Ferroelectric films for MEMS type devices using novel hybrid processing technology
title_sort ferroelectric films for mems type devices using novel hybrid processing technology
publishDate 2008
url https://hdl.handle.net/10356/4021
_version_ 1772828556460556288

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