Design of a heat flux sensor by MEMS technology
The purpose of this report is to look into the design, fabrication and calibration of a heat flux sensor using MEMS technology. MEMS technology is the acronym for microelectromechanical systems, which is a spin-off from the wafer fabrication techniques of the semiconductor industry. This is a sys...
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| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/13421 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | The purpose of this report is to look into the design, fabrication and calibration of
a heat flux sensor using MEMS technology. MEMS technology is the acronym for
microelectromechanical systems, which is a spin-off from the wafer fabrication
techniques of the semiconductor industry. This is a system of design and fabrication
techniques that works in the dimensional range of micron and sub-micron and it
involves expertise in electronic, electrical, chemical, and mechanical field. The
micro thermal sensor measuring heat flux is designed based on thermocouple
principle and is configured as a large circular thermopile. By using the design and
fabrication techniques of MEMS technology, the large thermopile consisting of
various thin-film layers can be contain in a small volume, making it possible to have
a micro-sensor. |
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