Rare earth oxide for nanoelectronics

• 主要作者: Lim, Iris Li Hwang.
• 其他作者: School of Materials Science and Engineering
• 格式: Final Year Project
• 語言: English
• 出版: 2010
• 主題: DRNTU::Engineering
• 在線閱讀: http://hdl.handle.net/10356/36178
• 機構: Nanyang Technological University

This project primarily focus is on investigating whether the introduction of a passivation layer would allow for the formation of a more uniform coating on the Si substrate surface. The thin films are used in various devices such as metal-oxide-semiconductor (CMOS) transistors. The scaling down of...