Fabrication of multilayer microfluidic chip

• Main Author: Goh, Jun Hui.
• Other Authors: Liu Aiqun
• Format: Final Year Project
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
• Online Access: http://hdl.handle.net/10356/40835
• Institution: Nanyang Technological University

This report describes a fabrication technique for building three-dimensional (3-D) microchannels in polydimethylsiloxane (PDMS). A novel system for aligning and bonding of patterned polydimethylsiloxane (PDMS) layers for the fabrication of three-dimensional microfluidic channels is presented. Soft lithography is used for fabrication of the silicon master. PDMS stamps were prepared out of this master and holes were punched for fluidic inlets and outlets. The upper part of the device is micro channel for the fluidic flow and the lower part is of reservoir for trapped the micro beads. Simulation was done by using simulation software, COMSOL for determined the deep of the reservoir required to demosttrate beads trapping. Particles were trapped bycontroling the flow rate and the deep of the reservoir. Alignment of two layers PDMS was performed using Karl Suss Mask Aligner equipped with specific tool designed and created by writer. Microbeads can be individually manipulated and trapped within the reservoir hosted by the device.