Design and fabrication of an optical accelerometer using silicon micro-machining
The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/4143 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Summary: | The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer. |
|---|