Design and fabrication of an optical accelerometer using silicon micro-machining

The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer.

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Bibliographic Details
Main Author:	Chiu, Man Ming.
Other Authors:	Tse, Man Siu
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Online Access:	http://hdl.handle.net/10356/4143
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4143
record_format	dspace
spelling	sg-ntu-dr.10356-41432023-07-04T15:20:36Z Design and fabrication of an optical accelerometer using silicon micro-machining Chiu, Man Ming. Tse, Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer. Master of Engineering 2008-09-17T09:45:22Z 2008-09-17T09:45:22Z 2001 2001 Thesis http://hdl.handle.net/10356/4143 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Chiu, Man Ming. Design and fabrication of an optical accelerometer using silicon micro-machining
description	The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer.
author2	Tse, Man Siu
author_facet	Tse, Man Siu Chiu, Man Ming.
format	Theses and Dissertations
author	Chiu, Man Ming.
author_sort	Chiu, Man Ming.
title	Design and fabrication of an optical accelerometer using silicon micro-machining
title_short	Design and fabrication of an optical accelerometer using silicon micro-machining
title_full	Design and fabrication of an optical accelerometer using silicon micro-machining
title_fullStr	Design and fabrication of an optical accelerometer using silicon micro-machining
title_full_unstemmed	Design and fabrication of an optical accelerometer using silicon micro-machining
title_sort	design and fabrication of an optical accelerometer using silicon micro-machining
publishDate	2008
url	http://hdl.handle.net/10356/4143
_version_	1772826827233951744

Design and fabrication of an optical accelerometer using silicon micro-machining

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