Ferroelectric thin films for hydrogen gas sensor

• Main Author: Deng, Jie
• Other Authors: Zhu, Weiguang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic circuits; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/4208
• Institution: Nanyang Technological University

In this thesis, the ferroelectric thin films of barium strontium titante (BST) and lead zirconate titante (PZT) as the sandwiched film integrated within the Pd/ferroelectric/Pt heterostructures for hydrogen gas sensing application have been systematically investigated.