Nano-scale characterization of advanced gate stacks using transmission electron microscopy and electron energy loss spectroscopy

• Main Author: Li, Xiang
• Other Authors: Pey Kin Leong
• Format: Theses and Dissertations
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/42369
• Institution: Nanyang Technological University

This thesis introduces the characterization methodologies which bridge microscopic properties of material change with macroscopic characteristics of a semiconductor device. The objective is to decode the nature of the insulator-to-conductor transition of the gate dielectrics when a leakage path is f...