High density, inductively coupled RF plasma source and its application in nitriding of stainless steel
The thesis presents an experimental and theoretical investigation of a low frequency, high density, inductively coupled plasma (ICP) source and its results of application in plasma nitriding of AISI 304 stainless steel. The experimental apparatus and diagnostics, including the RF voltage and curre...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2011
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| Online Access: | http://hdl.handle.net/10356/42714 |
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| Institution: | Nanyang Technological University |
| Language: | English |