High density, inductively coupled RF plasma source and its application in nitriding of stainless steel

The thesis presents an experimental and theoretical investigation of a low frequency, high density, inductively coupled plasma (ICP) source and its results of application in plasma nitriding of AISI 304 stainless steel. The experimental apparatus and diagnostics, including the RF voltage and curre...

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Bibliographic Details
Main Author: Luo, Wei Yi.
Other Authors: National Institute of Education
Format: Theses and Dissertations
Language:English
Published: 2011
Subjects:
Online Access:http://hdl.handle.net/10356/42714
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Institution: Nanyang Technological University
Language: English